We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm 2 TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

中文翻译：

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开发作为 Athena/X-IFU 仪器备用传感器的 Ti/Au TES 微量热仪阵列

我们正在开发基于 Ti/Au 超导双层的过渡边缘传感器 (TES) 微量热仪阵列，作为 Athena X 射线天文台 X-IFU 仪器的备用选项。阵列由频分复用读出系统使用 1–5 MHz 频带读出。NASA/Goddard 和 SRON 之间的广泛研究合作导致了微量热计的新设计规则，例如超导体双层的低电阻率、TES 通过改变纵横比的中等高欧姆电阻和没有额外的金属条。我们根据这些设计原则改进了我们的探测器制造工艺并生产了 TES 阵列。尽管这些阵列的单像素表征正在进行中，但 5 的最佳能量分辨率为 2.0 eV。已使用 120 × 20 μm 2 TES 观察到 9 keV X 射线，正常电阻为 150 mΩ，偏置在 2.2 MHz 频率。这表明我们的 Ti/Au TES 阵列有可能满足 X-IFU 仪器的检测器要求。