This paper presents beam modeling techniques for maximizing mechanical sensitivity of a butterfly resonator for gyroscopic applications. We investigate the geometric aspects of synchronizing beam that connects the wings of a butterfly resonator. Our results show that geometric variation in the synchronizing beam can have a large effect on the frequency split and sensitivity of the device. The model simulation shows a sensitivity of \( 10^{ - 12} \)\( (m/^\circ /s) \) for a frequency split of 10 Hz resulting from the optimized synchronized beam. Out of plane actuation was developed to drive and sense the resonators displacement. Fabricated butterfly resonators were tested, and the experimental results show a frequency split of 305 Hz and 400 Hz while the model illustrated a split of 195 Hz and 330 Hz respectively. The design and analysis presented in this paper can further aid the development of MEMS butterfly resonators for inertial sensing applications.

本文提出了用于使陀螺仪应用中的蝶形谐振器的机械灵敏度最大化的波束建模技术。我们研究了连接蝴蝶谐振器机翼的同步光束的几何形状。我们的结果表明，同步光束的几何变化会对设备的频率分割和灵敏度产生很大影响。模型仿真显示灵敏度为\（10 ^ {-12} \）\（（m / ^ \ circ / s）\）由优化的同步波束产生的10 Hz频率分裂。平面外致动被开发来驱动和感测谐振器的位移。测试了制成的蝶形谐振器，实验结果显示了305 Hz和400 Hz的频率分割，而模型分别说明了195 Hz和330 Hz的分割。本文提出的设计和分析可以进一步帮助开发用于惯性传感应用的MEMS蝶形谐振器。