In this paper, piezoelectric principle based an actuator is design for a micropump, which is suitable for drug delivery systems. The natural frequency and stress analysis have been performed to determine the reliability of the device in terms of minimum safety factor. We have observed the uniform deflections of the actuators by varying the thicknesses of the piezoelectric layer of the actuator. The design of the actuators is considered in circular and rectangular geometry. The materials are selected appropriately such that the component is biocompatible and can be used in biomedical applications. Among the various considerations made on dimensions and geometry, it is observed that the circular piezoelectric actuator undergoes a high displacement of 2950 μm at an infinitesimal thickness of 0.1 μm. At minimum safety factor of one, the maximum stress and voltage the actuator can hold is 596 GPa and 8500 V respectively.

在本文中，基于压电原理的执行器是为微型泵设计的，适用于药物输送系统。已经执行了固有频率和应力分析，以根据最小安全系数确定设备的可靠性。我们已经通过改变致动器的压电层的厚度观察了致动器的均匀挠曲。执行器的设计考虑为圆形和矩形几何形状。适当地选择材料，使得该组分是生物相容的并且可以用于生物医学应用中。在关于尺寸和几何形状的各种考虑中，可以观察到圆形压电致动器在0.1μm的最小厚度下经历了2950μm的高位移。在最低安全系数为1的情况下，