This paper is about the development of fluidic-based dome-shaped pressure sensor using spiral microchannel. The proposed pressure sensor consists of a dome-shaped structure, spiral shaped microchannel and coplanar electrode. Mechanical analysis of the dome-shaped membrane is carried out by using finite element analysis in terms of deflection and Mises Stress. A sensor with a 3.2 mm dome membrane radius, and 1.3 mm in dome thickness had been selected from the simulation and fabricated using soft lithography process. Polydimethylsiloxane is selected as a membrane due to its high elasticity compared to other polymers. Propylene carbonate electrolyte is for its high dielectric constant that gives good performance in terms of sensor sensitivity and its high boiling point which improves the longevity of the liquid inside the microchannel. Based on the experimental results, the operating frequency and sensitivity of the sensor were ideally observed at 4.4 kHz and 0.9376 pF/kPa, respectively. The effects of temperature, and lifetime were then recorded and discussed in this paper.

本文是关于使用螺旋微通道的基于流体的圆顶形压力传感器的开发。提出的压力传感器由圆顶形结构，螺旋形微通道和共面电极组成。圆顶形膜的力学分析是通过挠度和米塞斯应力方面的有限元分析来进行的。从模拟中选择了具有3.2 mm圆顶膜半径和1.3 mm圆顶厚度的传感器，并使用软光刻工艺制造了该传感器。聚二甲基硅氧烷由于与其他聚合物相比具有高弹性而被选作膜。碳酸亚丙酯电解质具有高介电常数，可在传感器灵敏度方面提供良好的性能，而其高沸点可改善微通道内液体的寿命。根据实验结果，理想情况下分别在4.4 kHz和0.9376 pF / kPa下观察到传感器的工作频率和灵敏度。然后记录并讨论了温度和寿命的影响。