A vertical liquid membrane electrochemical etching method is proposed for the fabrication of high-aspect-ratio microwire electrodes. The potential and current density distributions are simulated using COMSOL software. The simulation results show that the unique potential distribution generated by the proposed method, combined with reciprocating linear motion of the wire electrode, can be used to fabricate microwire electrodes with large aspect ratio. These simulation results are verified experimentally. Different concentrations of electrolyte result in different reaction rates and thus different distributions of the diffusion layer and different bubble flows, resulting in different morphologies of the prepared wire electrodes. The effect of electrolyte concentrations is studied experimentally. At low electrolyte concentrations, the products of electrolysis are removed from the processing area under the action of gravity, and uniform electrodes with high aspect ratio can be prepared. At high electrolyte concentrations, intense bubble production destroys the diffusion layer around the electrode and leads to a dynamic equilibrium state, allowing the preparation of uniform wire electrodes in a rough machining process. The proposed method can prepare wire electrodes with different initial diameters. In this paper, uniform wire electrodes of length 1900 μm, diameter 7 μm, and aspect ratio 270 are fabricated by the proposed method from a tungsten wire of initial diameter 50 μm.

提出了一种垂直液膜电化学刻蚀的方法，用于高纵横比的微丝电极的制造。使用COMSOL软件模拟电势和电流密度分布。仿真结果表明，该方法产生的独特的电势分布，结合线电极的往复直线运动，可用于制造长径比大的微线电极。这些仿真结果经过实验验证。不同浓度的电解质导致不同的反应速率，从而导致扩散层的分布不同和气泡流动的不同，从而导致制备的线电极的形态不同。实验研究了电解质浓度的影响。在低电解质浓度下 电解产物在重力作用下从处理区域移出，可以制备出高纵横比均匀的电极。在高电解质浓度下，强烈的气泡产生会破坏电极周围的扩散层并导致动态平衡状态，从而允许在粗糙的加工过程中制备均匀的线状电极。所提出的方法可以制备具有不同初始直径的线电极。在本文中，通过提出的方法，由初始直径为50μm的钨丝制造出长度为1900μm，直径为7μm，纵横比为270的均匀线电极。强烈的气泡产生会破坏电极周围的扩散层，并导致动态平衡状态，从而允许在粗糙的加工过程中制备均匀的线状电极。所提出的方法可以制备具有不同初始直径的线电极。在本文中，通过提出的方法，由初始直径为50μm的钨丝制造出长度为1900μm，直径为7μm，纵横比为270的均匀线电极。强烈的气泡产生会破坏电极周围的扩散层并导致动态平衡状态，从而允许在粗糙的加工过程中制备均匀的线状电极。所提出的方法可以制备具有不同初始直径的线电极。在本文中，通过所提出的方法，由初始直径为50μm的钨丝制造出长度为1900μm，直径为7μm，纵横比为270的均匀线电极。