The quality of coatings in industrial applications and scientific research with thicknesses in the micrometer range is an important criterion for quality management. Therefore, thickness determination devices are of high interest. Terahertz time-domain spectroscopy systems have demonstrated the capability to address thickness determination of dielectric single- and multilayer coatings on different substrates. However, due to the large range of different samples, there are different performance requirements to ensure a high-quality determination result. In this paper, we investigate the influence of system parameters—bandwidth and dynamic range—on thickness determination performance for a single-layer coating on metal substrates with thicknesses from 0.5 to 100 pm, based on measurements and numerical calculations within dynamic ranges from 10 to 90 dB and bandwidths from 1.5 to 10 THz.

中文翻译：

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系统性能对太赫兹时域光谱测定层厚度的影响

在工业应用和科学研究中，厚度在微米范围内的涂层质量是质量管理的重要标准。因此，厚度确定装置备受关注。太赫兹时域光谱系统已证明能够解决不同基材上单层和多层电介质涂层厚度的确定问题。但是，由于不同样本的范围很大，因此需要不同的性能要求以确保获得高质量的测定结果。在本文中，我们研究了系统参数（带宽和动态范围）对厚度为0.5至100 pm的金属基底上单层涂层的厚度确定性能的影响，