We designed and developed a new instrument for calibrating micro-force sensors. The calibration is traceable to the SI unit of mass and is realized from 1 µN–60 mN by means of electromagnetic force compensation of a balance. The expanded measurement uncertainty of our instrument comprises two contributions, an absolute contribution of 0.13 µN and a relative contribution of 2700 ppm. We verified our instrument in a bilateral comparison between METAS and PTB's instruments for forces from 40 µN up to 20 mN. The degrees of equivalence found by the two institutes are in excellent agreement.

中文翻译：

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微力测量：METAS的新仪器

我们设计并开发了一种用于校准微力传感器的新仪器。校准可溯源至国际质量单位，并通过天平的电磁力补偿在1 µN–60 mN范围内实现。我们仪器的扩展测量不确定度包括两个部分，一个是绝对值0.13 µN，一个是2700 ppm。我们在METAS和PTB的仪器之间双向比较中对40 µN至20 mN的力进行了验证。两家研究所发现的对等程度完全一致。