In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently, these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short range video rate images and large area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.

中文翻译：

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为高速原子力显微镜带来实时可追溯性

近年来，高速 AFM 的发展取得了长足的发展，它提供了超过数百微米的视频速率扫描和远程扫描的可能性。然而，直到最近，这些仪器还缺乏完全可追溯的计量。在本文中，使用光学干涉测量法的可追溯计量学已被添加到开环接触模式高速 AFM 中，以提供短距离视频速率图像和使用高速双通道组合制作的大面积扫描的可追溯性。轴扫描仪和远程定位系统。使用光学干涉测量确定载物台的位置和悬臂位移可以直接形成图像，无需复杂的后处理校正来补偿横向载物台误差。