Diamond‐like carbon (DLC) coatings were indented 3000 to 15 000 times cyclically using a Si₃N₄ sphere having a diameter of 10 mm under a normal load of approximately 107 N. DLC coatings were prepared by unbalanced magnetron (UBM) sputtering under substrate bias voltage of −200 on a heat‐treated and polished JIS SCM 415 substrates. SEM images and the energy dispersive X‐ray spectrometry (EDX) results of the indented impressions showed that a Cr/C layer or substrate surface partially revealed on the impressions. In order to estimate structural alterations in DLC coatings after cyclic indentations, Raman spectroscopy were performed on the impressions. Relationships between Raman parameters such as the intensity ratio I(D)/I(G) of the disorder peak around 1350 cm⁻¹ and the graphitic peak around 1580 cm⁻¹ and full width of half maximum of the G peak (FWHM(G)) were estimated with the Raman spectroscopy on the impressions. Enclosed area by maximum and minimum of I(D)/I(G) and FWHM(G) was defined as “Safety Zone” in this paper, and it can be used to determine integrity of DLC coatings.

中文翻译：

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从DLC涂层上的循​​环压痕得到的拉曼参数之间的关系

类金刚石碳（DLC）涂层使用直径为10 mm的Si ₃ N ₄球在约107 N的法向载荷下循环压痕3000至15000次。DLC涂层是在不平衡磁控管（UBM）溅射下制备的在经过热处理和抛光的JIS SCM 415基板上，基板偏置电压为-200。压痕的SEM图像和能量色散X射线光谱（EDX）结果表明，压痕中有Cr / C层或基材表面部分露出。为了估计循环压痕后DLC涂层的结构变化，对压痕进行了拉曼光谱分析。拉曼参数之间的关系，例如强度比I（D）/ I该病症的峰（G）周围1350厘米^-1和周围1580厘米石墨峰^-1和G峰的半峰全宽（FWHM（G））与该曝光的拉曼光谱估计。在本文中，最大和最小I（D）/ I（G）和FWHM（G）所围成的区域被定义为“安全区”，可用于确定DLC涂层的完整性。