Abstract An Eulerian–Eulerian model coupled with a population balance model (PBM) is adopted to investigate the growth process of polysilicon particles in a polysilicon fluidized bed reactor. A novel particle growth model, considering the effect of interphase velocity difference, is proposed and incorporated into PBM. The interphase mass transfer rate and particle growth rate are obtained based on the modified PBM. The effects of operating velocity and silane mole fraction on the particle growth rate and deposition efficiency are also analyzed. The results show that silicon fines scavenging occurs in the solid phase, especially in central and near-wall regions. Moreover, the increases of operating velocity and silane mole fraction lead to the decrease in the deposition efficiency.

中文翻译：

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多晶硅流化床反应器中颗粒生长过程的数值模拟

摘要 采用欧拉-欧拉模型结合种群平衡模型（PBM）来研究多晶硅流化床反应器中多晶硅颗粒的生长过程。考虑相间速度差的影响，提出了一种新的颗粒生长模型，并将其纳入 PBM。相间传质速率和颗粒生长速率是基于改进的 PBM 获得的。还分析了操作速度和硅烷摩尔分数对颗粒生长速率和沉积效率的影响。结果表明，硅细粉清除发生在固相中，尤其是在中心和近壁区域。此外，操作速​​度和硅烷摩尔分数的增加导致沉积效率的降低。