Abstract

Breakdown in oxygen, in external radio-frequency (RF) electric field is analyzed by employing a Monte Carlo simulation (MCS). Results were obtained for 13.56 MHz and distance between electrodes of 15 mm. Physical background of an oxygen RF breakdown is explained by observing time-resolved spatial distributions of electron concentration, mean energy, elastic scattering rate, ionization rate and attachment. The role of attachment is investigated in cases when these processes are included and when they are not. Especially influence of the attachment is highlighted by comparing oxygen and argon breakdown-voltage curves and spatial profiles. The electron losses induced by attachment extend the motion of the electron prebreakdown swarm much closer to electrodes to achieve a greater production; hence, spatial profiles at high values of the product pd where p is the pressure and d is the gap between electrodes, become more similar to those at the minimum of the breakdown curve. The most striking difference between the breakdown curves in argon and in oxygen is in the high increase of the breakdown voltage for high pd in oxygen.

Graphical abstract

中文翻译：

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氧气中射频击穿的蒙特卡罗模拟-附件的作用

摘要

通过使用蒙特卡罗模拟（MCS）分析外部射频（RF）电场中氧气的击穿。对于13.56MHz获得的结果以及电极之间的距离为15mm。通过观察时间分辨的电子浓度，平均能量，弹性散射率，电离率和附着率的空间分布，可以解释氧RF击穿的物理背景。在包含和不包含这些过程的情况下，将研究附件的作用。通过比较氧气和氩气的击穿电压曲线和空间分布，可以突出显示附件的影响。附着引起的电子损失使电子预击穿群的运动更接近电极，从而实现了更大的产量；因此，产品的高价值空间分布pd其中p是压力，d是电极之间的间隙，变得与击穿曲线最小值处的相似。氩气和氧气的击穿曲线之间最显着的差异在于氧气中高钯的击穿电压的高增加。

图形概要