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Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy
Plasma Science and Technology ( IF 1.6 ) Pub Date : 2020-04-16 , DOI: 10.1088/2058-6272/ab84e2
Fengdong JIA 1 , Yong WU 2 , Qi MIN 3 , Maogen SU 3 , Keigo TAKEDA 4 , Kenji ISHIKAWA 5 , Hiroki KONDO 5 , Makoto SEKINE 5 , Masaru HORI 5 , Zhiping ZHONG 1, 6
Affiliation  

A non-equilibrium atmospheric pressure argon (Ar) plasma excited by microsecond pulse is studied experimentally by laser scattering and optical emission spectroscopy (OES), and theoretically by collisional-radiative (CR) model. More specifically, the electron temperature and electron density of plasma are obtained directly by the laser Thomson scattering, the gas temperature is measured by laser Raman scattering, the optical emissions of excited Ar states of plasma are measured by OES. The laser scattering results show that the electron temperature is about 1 eV which is similar to that excited by 60 Hz AC power, but the gas temperature is as low as 300 K compared to about 700 K excited by 60 Hz AC power. It is shown that the microsecond pulsed power supply, rather than nanosecond ones, is short enough to reduce the gas temperature of atmospheric pressure plasma to near room temperature. The electron temperature and electron density are also obtained by CR model based on OES, an...

中文翻译:

使用激光散射和光发射光谱法表征微秒脉冲非平衡大气压Ar等离子体

通过激光散射和光发射光谱(OES),并通过碰撞辐射(CR)模型,对由微秒脉冲激发的非平衡大气压氩(Ar)等离子体进行了实验研究。更具体地,通过激光汤姆森散射直接获得等离子体的电子温度和电子密度,通过激光拉曼散射测量气体温度,通过OES测量等离子体的激发Ar态的光发射。激光散射结果表明,电子温度约为1 eV,与60 Hz交流电激发的电子温度相似,但气体温度低至300 K,而60 Hz交流电激发的电子温度为700K。结果表明,微秒脉冲电源而不是纳秒脉冲电源,足够短以将大气压等离子体的气体温度降低到接近室温。电子温度和电子密度也可以通过基于OES的CR模型获得,并得到电子密度。
更新日期:2020-04-24
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