The emission spectra of krypton plasma in the range of 8–14 nm upon excitation of a pulsed gas jet by 1.06-μm Nd : YAG laser radiation with a pulse energy of 0.85 J, pulse duration of 5.2 ns, and repetition rate of 10 Hz are investigated. The krypton emission spectrum is a wide (8–14 nm) band, peaking at 10.3 nm, which is formed by a series of much narrower lines. The observed lines are identified, and the fraction of laser pulse energy converted into the (8–14)-nm emission band and emitted into half-space (2π sr) is determined. The maximum conversion efficiency is found to be 21%. The expected throughputs of lithographic systems with sources based on Sn, Xe, and Kr ions for different wavelengths, corresponding to the emission peaks of ions of these materials, are compared.

中文翻译：

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脉冲激光激发后 (8-14)-nm 波段氪离子的激光效率

用 1.06 μm Nd 激发脉冲气体射流后，氪等离子体在 8-14 nm 范围内的发射光谱：脉冲能量为 0.85 J、脉冲持续时间为 5.2 ns、重复率为 10 Hz 的 YAG 激光辐射被调查。氪发射光谱是一个宽 (8-14 nm) 波段，在 10.3 nm 处达到峰值，由一系列更窄的谱线形成。识别观察到的线，并确定转换成 (8-14)-nm 发射带并发射到半空间 (2π sr) 的激光脉冲能量的分数。发现最大转换效率为 21%。比较了基于 Sn、Xe 和 Kr 离子源的光刻系统在不同波长下的预期吞吐量，对应于这些材料的离子发射峰。