This paper introduces the integrated generator and its design verification. In order to analyze the output performance of the thermoelectric generator, the design verification is carried out using ANSYS finite element simulation. In the simulation of traditional thermocouple structure, the maximum power factor is 8.99 × 10⁻³ μWcm⁻²K⁻². In the simulation of I-shaped thermocouple structure, the maximum power factor is 11.39 × 10⁻³ μWcm⁻²K⁻². It verifies that compare with the traditional thermocouple, the I-shaped thermocouple can increase the maximum power factor. The thermoelectric-photoelectric integrated generator is fabricated by one multi-step MEMS process. The bottom of integrated generator is the light energy collector. The top of integrated generator is the thermal energy collector. Polyimide is coated on the upper end of the thermopile to make the heat transfer smoothly. It also make the temperature difference between the front side and back side larger. In the experiment, the thermoelectric and photoelectric properties of the generator are tested at room temperature. The maximum power factor of the generator is 7.81 × 10⁻³ μWcm⁻²K⁻². The photoelectric efficiency is 7.58%. The I-shaped thermocouple structure reduces contact resistance and increases the maximum power factor of the thermoelectricity. In practical use, this generator can power portable sensors.

本文介绍了集成发电机及其设计验证。为了分析热电发电机的输出性能，使用ANSYS有限元模拟进行了设计验证。在传统的热电偶结构的仿真，最大功率因数为8.99×10 ^-3  μWcm ^-2 ķ ^-2。在I-形热电偶结构的仿真，最大功率因数为11.39×10 ^-3  μWcm ^-2 ķ ^-2。验证了与传统热电偶相比，工字型热电偶可以增加最大功率因数。该热电-光电集成发电机通过一个多步骤的MEMS工艺制造。集成发电机的底部是光能收集器。集成发电机的顶部是热能收集器。聚酰亚胺被涂在热电堆的上端，以使热传递平稳。这也使正面和背面之间的温差更大。在实验中，在室温下测试发生器的热电和光电性能。发电机的最大功率因数为7.81×10 ^-3  μWcm ^-2 ķ ^-2。光电效率为7.58％。I形热电偶结构可降低接触电阻并增加热电的最大功率因数。在实际使用中，该发生器可以为便携式传感器供电。