The spatio-temporal ionization and excitation dynamics in low-pressure radiofrequency (RF) discharges operated in neon are studied and a detailed comparison of experimental and kinetic simulation results is provided for a wide parameter regime. Phase resolved optical emission spectroscopy (PROES) measurements and 1d3v particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations are performed in a geometrically symmetric capacitively coupled plasma (CCP) reactor at driving frequencies ranging from 3.39 MHz to 13.56 MHz, pressures between 60 Pa and 500 Pa, at a peak-to-peak voltage of 330 V. We examine the applicability of PROES (which provides information about the spatio-temporal distribution of the electron-impact excitation dynamics from the ground state into the Ne 2p1 state) to probe the discharge operation mode in neon (which is determined by the spatio-temporal distribution of the ionization dynamics). We !nd that the spatio-temporal excitation rates measured by PROES are in a good agreement with the excitation rates obtained from the PIC/MCC simulations, for all the discharge conditions studied here. However, the ionization dynamics is found to be signi!cantly different from the excitation dynamics under most of the discharge conditions studied here, especially at higher values of the driving frequency and lower values of the pressure, when energetic heavy particle induced secondary electrons (γ-electrons) are more likely to ionize than to excite. PROES does not probe the discharge operation mode under these conditions. At a !xed frequency and peak-to-peak voltage, the spatio-temporal distribution of the ionization rate obtained from PIC/MCC simulations shows a transition of the discharge operation mode from the α-mode to the γ-mode by increasing the pressure. However, PROES fails to show this transition. While in the spatio-temporal distribution of the excitation rate obtained from the PROES measurements and the PIC/MCC simulations the α-peak (the intensity maximum at the bulk side of the expanding sheath edge) is dominant and a γ-peak (a maximum near the edge of the fully expanded sheath) becomes visible only at high values of the pressure or at the lowest frequency of 3.39 MHz, a γ-peak is visible in the 5 Author to whom any correspondence should be addressed. 1361-6595/20/055002+14$33.00 1 © 2020 IOP Publishing Ltd Printed in the UK Plasma Sources Sci. Technol. 29 (2020) 055002 B Horváth et al ionization rate for all operation conditions, and it dominates the ionization in the vast majority of the cases investigated.

中文翻译：

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氖电容射频放电中电子功率吸收模式跃迁的实验和动力学模拟研究

研究了在氖中操作的低压射频 (RF) 放电的时空电离和激发动力学，并为广泛的参数范围提供了实验和动力学模拟结果的详细比较。相分辨光发射光谱 (PROES) 测量和 1d3v 细胞内粒子/蒙特卡罗碰撞 (PIC/MCC) 模拟在几何对称电容耦合等离子体 (CCP) 反应器中进行，驱动频率范围为 3.39 MHz 至 13.56 MHz，压力介于 60 Pa 和 500 Pa 之间，峰峰值电压为 330 V。我们研究了 PROES（它提供了有关从基态到 Ne 2p1 态的电子撞击激发动力学的时空分布的信息）的适用性，以探测氖中的放电操作模式（由时空决定）电离动力学的分布）。我们发现，对于这里研究的所有放电条件，PROES 测量的时空激发率与从 PIC/MCC 模拟获得的激发率非常一致。然而，发现电离动力学与此处研究的大多数放电条件下的激发动力学显着不同，特别是在较高的驱动频率值和较低的压力值下，当高能重粒子诱导二次电子（γ-电子）更有可能电离而不是激发时。PROES 不探测这些条件下的放电操作模式。在固定频率和峰峰值电压下，从 PIC/MCC 模拟获得的电离率的时空分布显示，通过增加压力，放电操作模式从 α 模式转变为 γ 模式. 但是，PROES 未能显示这种转变。而在从 PROES 测量和 PIC/MCC 模拟中获得的激发速率的时空分布中，α 峰（扩展鞘边缘主体侧的强度最大值）占主导地位，而 γ 峰（最大接近完全扩张的鞘的边缘）仅在高压力值或最低频率 3 时才可见。39 MHz 时，在 5 作者中可以看到 γ 峰，任何通信都应发送给该作者。1361-6595/20/055002+14$33.00 1 © 2020 IOP Publishing Ltd 英国印刷 Plasma Sources Sci. 技术。29 (2020) 055002 B Horváth 等人在所有操作条件下的电离率，在绝大多数调查案例中它主导着电离率。