We have developed a single-modal linear motor which contains two kinds of PZT ceramics. The linear motor works by exciting the transverse vibration mode of the PZT ceramic on the upper surface of stator elastomer and the shear vibration mode of PZT ceramics at two ends simultaneously. The operation principle of the motor is analyzed in detail. And the rule of the driving foot amplitude varies with the size of the end protruding structure has been further researched by FEM analysis. The prototype is manufactured, and its operating characteristics are experimentally studied and analyzed. The no-load velocity and the maximum output force are tested to be 169.4 mm/s and 1.1 N, respectively. The results show that extra arrangement of PZT ceramics which works on shear vibration mode can efficiently improve the output of motor.

中文翻译：

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基于压电陶瓷多振型的单模线性超声波电机

我们开发了一种包含两种 PZT 陶瓷的单模态直线电机。直线电机的工作原理是同时激发定子弹性体上表面PZT陶瓷的横向振动模态和两端PZT陶瓷的剪切振动模态。详细分析了电机的工作原理。并通过有限元分析进一步研究了驱动脚幅值随末端突出结构尺寸变化的规律。制造了样机，并对其运行特性进行了实验研究和分析。空载速度和最大输出力经测试分别为 169.4 mm/s 和 1.1 N。结果表明，在剪切振动模式下工作的PZT陶瓷的额外布置可以有效地提高电机的输出。