Partial pressure measurement has become indispensable for many applications and contributes to the complete characterization of a vacuum system. In this work, an ultrahigh vacuum (UHV) standard was established for calibrating partial pressure analyzers as a partial pressure standard, and a new method was introduced to generate standard partial pressures, which was named ‘the dynamic expansion method based on static expansion vacuum standard injection mode’. The method can produce standard partial pressures in the range from 10 –5 Pa to 10 –10 Pa. The relative standard uncertainty budgets of generated partial pressures ( k = 1) were in the range from 2.8% up to 5.0% from 10 –5 Pa to 10 –9 Pa for nitrogen. Employing this method, the sensitivity calibrations of quadrupole mass spectrometry (QMS) were performed in the partial pressure range of 8.62 × 10 −5 Pa to 1.51 × 10 −10 Pa with single inert He, Ar, and Kr gas in...

中文翻译：

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具有选项的UHV标准可用作分压标准

分压测量已成为许多应用必不可少的部分，并有助于真空系统的完整表征。在这项工作中，建立了用于校准分压分析仪的超高真空（UHV）标准作为分压标准，并引入了一种新的生成标准分压的方法，称为“基于静态膨胀真空标准的动态膨胀方法”。注射模式”。该方法可以产生10 –5 Pa到10 –10 Pa的标准分压。产生的分压（k = 1）的相对标准不确定性预算在2.8％到10 –5的5.0％范围内。氮的Pa至10 –9 Pa。使用这种方法，在8分压范围内进行了四极质谱（QMS）的灵敏度校准。