In this study, a fluorine‐based reactive plasma jet is investigated as a promising tool for ultraprecise surface machining of N‐BK7®. Plasma‐generated particles react with an N‐BK7 surface to create volatile and nonvolatile compounds. The desorption of volatile compounds results in an etched surface, whereas nonvolatile compounds form a residual layer in the etched area, causing unpredictable effects on the etching rate. Surface temperature treatment is proposed to improve the machining procedure with respect to deterministic material removal, leading to predictable results. It is shown that, at an elevated surface temperature, the residual layer properties are modified in favor of improved etching performance. The etching behavior of N‐BK7 is compared with fused silica to verify the optimality of the obtained results.

中文翻译：

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对N‐BK7®的氟基反应等离子体射流加工进行温度处理的有效性的研究

在这项研究中，对基于氟的反应等离子体射流进行了研究，以作为N-BK7®超精密表面加工的有前途的工具。等离子体生成的粒子与N-BK7表面反应生成挥发性和非挥发性化合物。挥发性化合物的解吸导致蚀刻的表面，而非挥发性化合物在蚀刻区域中形成残留层，从而对蚀刻速率产生不可预测的影响。提出表面温度处理以改善确定性材料去除方面的加工程序，从而产生可预测的结果。结果表明，在升高的表面温度下，残余层的性能被改善，从而改善了蚀刻性能。将N‐BK7的蚀刻行为与熔融石英进行比较，以验证所获得结果的最佳性。