A collisional radiative model for fast estimation and monitoring of atomic oxygen ground and excited state densities and fluxes in varying Ar:O 2 mixtures is developed and applied in a double inductively coupled plasma source at a pressure of 5 Pa and incident power of 500 W. The model takes into account measured line intensities of 130.4 nm, 135.6 nm, 557.7 nm, and 777.5 nm, the electron densities and electron energy distribution functions determined using a Langmuir probe and multipole resonance probe as well as the state densities of the first four excited states of argon measured with the branching fraction method and compared to tunable diode laser absorption spectroscopy. The influence of cascading and self absorption is included and the validity of the used cross sections and reaction rates is discussed in detail. The determined atomic oxygen state densities are discussed for their plausibility, sources of error, and compared to other measurements. Furthermore, ...

中文翻译：

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使用光发射和吸收光谱和探针测量确定双感应耦合等离子体中的原子氧态密度

建立了一个碰撞辐射模型，用于快速估算和监视不同的Ar：O 2混合物中的原子氧基态和激发态密度和通量，并将其应用于压力为5 Pa，入射功率为500 W的双感应耦合等离子体源中。该模型考虑了测得的130.4 nm，135.6 nm，557.7 nm和777.5 nm的线强度，使用Langmuir探针和多极共振探针确定的电子密度和电子能量分布函数以及前四个激发态的态密度用支化分数法测量的氩气态与可调谐二极管激光吸收光谱法比较。包括级联和自吸收的影响，并详细讨论了所用横截面和反应速率的有效性。讨论了确定的原子氧态密度的合理性，误差来源，并与其他测量结果进行了比较。此外...