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Ammonothermal growth of 2-inch-long GaN single crystals using an acidic NH4F mineralizer in a Ag-lined autoclave
Applied Physics Express ( IF 2.3 ) Pub Date : 2020-04-20 , DOI: 10.35848/1882-0786/ab8722
Daisuke Tomida 1 , Quanxi Bao 1, 2 , Makoto Saito 1, 3 , Ryu Osanai 1, 2 , Kohei Shima 1 , Kazunobu Kojima 1 , Tohru Ishiguro 1 , Shigefusa F. Chichibu 1
Affiliation  

Seeded ammonothermal growths of a few-mm-thick GaN crystals on a 2 inch diameter c-plane and a 45 mm long m-plane GaN wafers were carried out by using an NH4F mineralizer in a 60 mm diameter Ag-lined autoclave. As a result of dynamic control of the temperature profile, low dislocation density and nearly bowing-free m-plane GaN was grown: i.e. the full-width at half-maximum values for the X-ray rocking curves of the 10 2 reflections were smaller than 28 arcsec and the radius of curvature was estimated to be 1460 m. In addition, its low temperature photoluminescence spectrum exhibited free and neutral donor-bound exciton emission peaks.

中文翻译:

在 Ag 衬里高压釜中使用酸性 NH 4 F 矿化剂氨热生长 2 英寸长的 GaN 单晶

通过在 60 毫米直径的银衬里高压釜中使用 NH4F 矿化剂,在 2 英寸直径的 c 平面和 45 毫米长的 m 平面 GaN 晶片上进行了几毫米厚的 GaN 晶体的种子氨热生长。由于温度分布的动态控制,低位错密度和几乎无弯曲的 m 面 GaN 得到生长:即 10 2 次反射的 X 射线摇摆曲线的半高全宽值更小超过 28 弧秒,曲率半径估计为 1460 m。此外,其低温光致发光光谱表现出自由和中性的供体结合激子发射峰。
更新日期:2020-04-20
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