Nanophotonics, manipulating light–matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.

中文翻译：

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红外导波纳米光子传感器与器件研究进展。

纳米光子学在纳米尺度上操纵光与物质的相互作用，对于多样化的生化和物理传感应用来说是一项有吸引力的技术。导波纳米光子学为传感器的小型化和实现各种光子元件的片上集成铺平了道路，从而为未来实现需要部署大量传感器节点的物联网实现芯片级传感系统铺平了道路。从红外领域流行的CMOS兼容硅纳米光子学开始，开发了多种红外导波纳米光子传感器，呈现出灵敏度高、检测限低、串扰小、检测复用能力强、抗电磁干扰、体积小等优点。占地面积和成本低。在这篇综述中，我们概述了红外导波纳米光子传感器的最新研究进展。描述了传感器配置、传感机制、传感性能、性能改进策略和系统集成。还提出了未来的发展方向，以克服当前工业化的技术障碍。