A novel photoacoustic spectroscopy gas sensor based on a micro-resonator has been developed. The photoacoustic cell was designed and fabricated using 3-D printing and the photoacoustic cell volume was compressed significantly. This design greatly reduces the time of manufacturing the micro-resonator and the weight was lighter compared to traditional cells. Furthermore, the acoustic pressure distribution in the 3-D printed photoacoustic cell was analyzed by COMSOL Multiphysics software, which indicated that the strongest acoustic pressure occurred in the middle of the resonant cavity. The performance of the sensor was evaluated by detection of CH4 at normal atmospheric pressure used a near infrared distributed feedback laser emitted at 1653 nm. The characteristic of the photoacoustic signal under different pressures was also investigated. An Allan variance shows that the 3-D printed photoacoustic spectroscopy sensor has the detection limit of 1.44 ppmv (3σ) for CH4 detection at about 200 s integration time.

中文翻译：

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3D打印气室中基于光声光谱的痕量气体检测

开发了一种基于微谐振器的新型光声光谱气体传感器。光声电池是使用 3-D 打印设计和制造的，光声电池体积被显着压缩。与传统电池相比，这种设计大大减少了制造微谐振器的时间，并且重量更轻。此外，COMSOL Multiphysics 软件对 3D 打印光声单元中的声压分布进行了分析，结果表明，最强的声压发生在谐振腔的中部。传感器的性能是通过在正常大气压下使用 1653 nm 发射的近红外分布式反馈激光器检测 CH4 来评估的。还研究了不同压力下光声信号的特性。