Following up our earlier work that highlighted the relationship between shear force (SF) and platen motor current (PMC), in parallel with the relationship between coefficient of friction (COF) and PMC for various tungsten and interlayer dielectric (ILD) chemical mechanical planarization (CMP) cases at non-steady-state conditions, we explored whether or not PMC could be used as a reliable indicator instead of SF and COF at steady-state conditions. For the 12 cases studied, 72 distinct steps were analyzed. It was determined that PMC somewhat mirrored SF and PMC for long time (i.e. 10 s or longer) intervals after data averaging and applying a trend matching algorithm. SF and PMC trends matched only about 64% of the time (ranges between 45% to 85%) for all 72 steps, while PMC and COF trends matched 62% of the time ranging between 42% and 85%. PMC-SF and PMC-COF correlations were fairly poor at 1-sec time intervals as evidenced by much lower percent match values. Such poor correlatio...

中文翻译：

---

稳态条件下钨和层间介电化学机械平面化中摩擦和剪切力与压板电动机电流的相关性

在我们之前的工作中，重点介绍了剪切力（SF）和压板电机电流（PMC）之间的关系，以及各种钨和层间电介质（ILD）化学机械平面化的摩擦系数（COF）和PMC之间的关系（ CMP）在非稳态条件下的案例，我们探讨了在稳态条件下PMC是否可以代替SF和COF用作可靠指标。对于研究的12个案例，分析了72个不同的步骤。确定在对数据进行平均并应用趋势匹配算法后，PMC在较长的时间间隔（即10 s或更长时间）内稍微映射了SF和PMC。对于所有72个步骤，SF和PMC趋势仅匹配约64％的时间（范围在45％至85％之间），而PMC和COF趋势与时间匹配达62％的时间，介于42％至85％之间。PMC-SF和PMC-COF的相关性在1秒的时间间隔内相当差，匹配值百分比要低得多。如此差的相关性...