Micron ( IF 2.5 ) Pub Date : 2020-04-17 , DOI: 10.1016/j.micron.2020.102873 Paweł Kozikowski 1
Optical photogrammetry software has been applied to scanning electron microscope images to obtain 3D models and quantitative data on carbon particles and graphite nanoparticles. Image acquisition has been automated by the use of external macro software. Mesh data has been reconstructed from a number of images taken at multiple sample stage tilt angles with a supplementary measurement of TEM grids for method validation. This 3D model has been scaled and processed to obtain values such as the volume, height and surface area of the samples and has been quantitatively compared to 2D measurements.
中文翻译:
通过摄影测量法从SEM图像中提取三维信息。
光学摄影测量软件已应用于扫描电子显微镜图像,以获得有关碳粒子和石墨纳米粒子的3D模型和定量数据。图像获取已通过使用外部宏软件实现了自动化。网格数据是通过在多个样品台倾斜角度拍摄的大量图像以及TEM网格的补充测量值重建的,用于方法验证。对该3D模型进行了缩放和处理,以获取诸如样品的体积,高度和表面积之类的值,并且已与2D测量进行了定量比较。