This brief presents a novel damping control scheme for piezoactuated nanopositioning platforms with robust resonant control (RRC). The RRC is developed to attenuate the resonant-vibrational modes of the lightly damped dynamics of the stage in an inner positive feedback loop. The parameters in the proposed RRC are determined through an analytical approach. Indeed, the controller gains constrained by both the robustness and the damping ratio of the inner loop are tuned based on the small gain theory. Then, a high gain integral tracking controller is applied in the outer loop to minimize the tracking errors due to unmodeled nonlinearity and uncertainties. To validate the effectiveness of the proposed RRC, comparative experiments with conventional positive position feedback (PPF) and integral resonant control (IRC) are conducted on a piezoactuated nanopositioning stage. Results demonstrate that the proposed RRC improves the closed-loop bandwidth from 67 Hz with PPF and 135 Hz with IRC to 176 Hz. Moreover, better robustness against load variations with a range of 0–1000-g loading under 0–20-Hz input raster scanning signals are obtained by RRC compared with PPF as well as IRC.

中文翻译：

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用于纳米定位器高速扫描的鲁棒谐振控制器：设计与实现

本文简要介绍了一种具有鲁棒共振控制（RRC）的压电致动纳米定位平台的新型阻尼控制方案。开发了RRC是为了衰减内部正反馈环路中平台的轻微阻尼动力学的共振振动模式。建议的RRC中的参数是通过分析方法确定的。实际上，基于小增益理论来调整受内部环路的鲁棒性和阻尼比约束的控制器增益。然后，将高增益积分跟踪控制器应用于外环，以最大程度地减少由于未建模的非线性和不确定性导致的跟踪误差。为了验证提议的RRC的有效性，在压电驱动的纳米定位平台上进行了带有常规正位置反馈（PPF）和积分共振控制（IRC）的对比实验。结果表明，所提出的RRC将闭环带宽从PPF的67 Hz和IRC的135 Hz提高到176 Hz。此外，与PPF和IRC相比，通过RRC获得了在0–20 Hz输入栅格扫描信号下0–1000 g负载范围内更好的负载变化鲁棒性。