Abstract The TiOX thin films were grown on the glass substrate for the low-e film applications by direct-current magnetron sputtering methods. The composite nature of dielectric and metallic phases including Ti2O3, TiO2 and amorphous TiOx were identified from the comparative study of x-ray diffraction and Raman spectroscopy. The coalescent nanocolumnar structure revealed from scanning electron microscopy is believed to be responsible for the absence of the interference in the transmission. Most interestingly, the narrow transmittance bands from the films were observed in the visible region, especially in the violet-blue-green color portion, which could be ideal for the applications of narrow band-pass filters or red/infrared reflectors.

中文翻译：

---

用于低辐射涂层的复合氧化钛纳米柱状薄膜

摘要 通过直流磁控溅射法在玻璃基板上生长了用于低辐射膜应用的 TiOX 薄膜。通过 X 射线衍射和拉曼光谱的比较研究，确定了介电相和金属相的复合性质，包括 Ti2O3、TiO2 和无定形 TiOx。扫描电子显微镜显示的聚结纳米柱结构被认为是传输中不存在干扰的原因。最有趣的是，在可见光区域观察到薄膜的窄透射带，特别是在紫-蓝-绿色部分，这对于窄带通滤光片或红/红外反射器的应用来说可能是理想的。