Abstract In this study, mid infrared optical modulation property of VOx films with temperature was researched. VOx film which contain both VO2 and V2O5 was deposited on Al2O3 substrate by radio frequency magnetron sputtering. The mid infrared transmittance undergoes two reductions when increasing the temperature to 590 °C, the first reversible reduction around 68 °C as the phase transition of VO2 and the second irreversible gradually reduction starting around 350 °C because the oxidation state changed from V2O5 to VO2. The transmittance increased from 5.49% to 70.29% when cooling the temperature around 54℃. The film has the reversible 64% optical modulation around 60 °C during the second thermal cycling and keep stable even increased the temperature higher than 550 °C. The difference caused by high temperature thermal cycling in surface morphology structures, and chemical composition, were characterized by AFM, XRD, Raman, and XPS. The process of phase transition and the oxidation state changed during the thermal cycles were monitored with temperature dependent Raman spectra. This study provides new information about the transition between different structures and oxidation states of VOx film and a good candidate for infrared thermochromic window.

中文翻译：

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磁控溅射沉积钒氧化物薄膜的结构和光学性能随温度的演变

摘要 本研究研究了VOx薄膜随温度变化的中红外光调制特性。通过射频磁控溅射在 Al2O3 衬底上沉积同时含有 VO2 和 V2O5 的 VOx 薄膜。当温度升高到 590 °C 时，中红外透射率经历两次降低，第一次在 68 °C 左右发生可逆还原，作为 VO2 的相变，第二次在 350 °C 左右开始不可逆逐渐还原，因为氧化态从 V2O5 变为 VO2 . 当温度冷却到54℃左右时，透光率从5.49%提高到70.29%。该薄膜在第二次热循环期间在 60°C 左右具有可逆的 64% 光学调制，即使温度升高到 550°C 以上也能保持稳定。由高温热循环引起的表面形貌结构和化学成分的差异通过 AFM、XRD、拉曼和 XPS 进行表征。相变过程和在热循环期间改变的氧化态用温度相关的拉曼光谱监测。这项研究提供了关于 VOx 膜不同结构和氧化态之间转变的新信息，并且是红外热致变色窗口的良好候选者。