Compared with the lever-type amplifier, the rhombus-type amplifier has attracted more attention by virtue of large displacement amplification ratio, compact structure, and linear output displacement. In this paper, a novel electromagnetic force balance sensor (EFBS) based on the rhombus-type amplifier is presented to measure the mass with high precision. First, the structure and operating principle of the EFBS are described, and the requirements for the design and manufacture of the amplifier are put forward. Then, the analytical models of the two-stage rhombus-type amplifier are given out, and two guiding mechanisms are analyzed and modeled. Furthermore, the validity of the established model is verified by finite element analysis (FEA). Thanks to the theoretical guidance, an electromagnetic force balance sensor based on the two-stage rhombus-type amplifier and double parallelogram flexure mechanism is designed and tested. The experimental results demonstrate that the developed EFBS can measure the mass of the objects with high precision, and also verifies the correctness of the analytical model. This provides a new concept for the structural design of the EFBS.

与杠杆型放大器相比，菱形型放大器因其大的位移放大率，紧凑的结构和线性的输出位移而倍受关注。本文提出了一种新型的基于菱形放大器的电磁力平衡传感器（EFBS），可以高精度地测量质量。首先，介绍了EFBS的结构和工作原理，并对放大器的设计和制造提出了要求。然后，给出了两级菱形放大器的分析模型，并对两种导向机理进行了分析和建模。此外，所建立模型的有效性通过有限元分析（FEA）进行了验证。有了理论上的指导，设计并测试了基于两级菱形放大器和双平行四边形挠曲机构的电磁力平衡传感器。实验结果表明，所开发的EFBS可以高精度地测量物体的质量，并验证了分析模型的正确性。这为EFBS的结构设计提供了新概念。