In this study, plasma‐enhanced chemical vapor deposition of cyclohexane thin films was prepared for application towards ethanol and ammonia vapor sensing between the range 100 and 1,000 ppm. The deposited film exhibited stable, uniform coating and smooth surface morphology with minor surface roughness. The thickness of the coatings was 40–46 nm. The gas‐sensing behavior against the experimental parameters such as coating thickness, operating temperature, and gas concentration was investigated. It was noted that increasing the coating thickness reduced the sensor's electrical conductivity. Increment in the operating temperature from 75°C to 100°C increased the sensor performance linearly. The ethanol and ammonia concentration effects were mainly influenced by the above two factors. The results demonstrated that the cyclohexane thin films can be used to fabricate low‐cost gas sensors in addition to its conventional use as a low dielectric material.

中文翻译：

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等离子聚合的环己烷涂料，用于乙醇和氨蒸气感测

在本研究中，准备了用于环己烷薄膜的等离子增强化学气相沉积，以用于100至1,000 ppm范围内的乙醇和氨蒸气传感。沉积的膜表现出稳定，均匀的涂层和光滑的表面形态，且表面粗糙度较小。涂层的厚度为40-46 nm。针对实验参数，例如涂层厚度，工作温度和气体浓度，对气体传感行为进行了研究。注意到增加涂层厚度降低了传感器的电导率。将工作温度从75°C升高到100°C线性提高了传感器性能。乙醇和氨的浓度影响主要受以上两个因素影响。