Double-sided Fresnel zone plates are diffractive lenses used for high-resolution hard X-ray microscopy. The double-sided structures have significantly higher aspect ratios compared with single-sided components and hence enable more efficient imaging. The zone plates discussed in this paper are fabricated on each side of a thin support membrane, and the alignment of the zone plates with respect to each other is critical. Here, a simple and reliable way of quantifying misalignments by recording efficiency maps and measuring the absolute diffraction efficiency of the zone plates as a function of tilting angle in two directions is presented. The measurements are performed in a setup based on a tungsten-anode microfocus X-ray tube, providing an X-ray energy of 8.4 keV through differential measurements with a Cu and an Ni filter. This study investigates the sources of the misalignments and concludes that they can be avoided by decreasing the structure heights on both sides of the membrane and by pre-programming size differences between the front- and back-side zone plates.

中文翻译：

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双面硬X射线菲涅耳波带片中未对准的测量和补偿。

双面菲涅耳波带片是用于高分辨率硬X射线显微镜的衍射透镜。与单面组件相比，双面结构的纵横比高得多，因此可以实现更有效的成像。本文讨论的区域板是在薄支撑膜的每一侧上制造的，区域板彼此之间的对准至关重要。在此，提出了一种简单而可靠的方法，该方法通过记录效率图并测量区域板的绝对衍射效率作为两个方向上的倾斜角度的函数来量化未对准。在基于钨阳极微焦点X射线管的设置中执行测量，通过使用Cu和Ni滤镜的差分测量提供8.4 keV的X射线能量。