It is considered that the traditional 2D planar getter is difficult to achieve an order of magnitude increase in SSA (Specific Surface Area), so we proposed and prepared the 3D nickel-based nano-scaffold getter to further increase its SSA and finally enhance its inspiratory capacity. Nitrogen adsorption test results indicated that SSA of the two-stage nano-scaffold getter with the deposition of 200 nm titanium film could reach to 4.362 m2/g. This made it show very large adsorbability. In the testing of thermogravimetric analysis, the sorption mass of the sample reached 2.72395 mg in the process of heating to 600 °C. Therefore, its sorption rate is 6.9 ×10−4 mg/ (s.g), which was entirely due to the increase in SSA. In addition, aiming at toxic of the getter and thermal sensitivity of MEMS devices, we introduced electromagnetic induction heating to activate the getter, because this method can noncontact and local heating. Our testing results indicated that the getter could be heated above 400 °C in 1s. It means that the getter could be rapidly activated and re-activated after packaging of MEMS devices.

中文翻译：

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感应加热快速活化镍基纳米支架吸气剂的研究

考虑到传统的2D平面吸气剂难以实现SSA（比表面积）的数量级增加，因此我们提出并制备了3D镍基纳米支架吸气剂以进一步增加其SSA并最终增强其吸气性。容量。氮吸附试验结果表明，沉积200 nm钛膜的二级纳米支架吸气剂的SSA可达4.362 m2/g。这使它显示出非常大的吸附能力。在热重分析测试中，样品在加热至600℃的过程中吸附质量达到2.72395mg。因此，它的吸附率为 6.9 ×10−4 mg/ (sg)，这完全是由于 SSA 的增加。此外，针对 MEMS 器件的吸气剂和热敏性的毒性，我们引入了电磁感应加热来激活吸气剂，因为这种方法可以非接触和局部加热。我们的测试结果表明，吸气剂可以在 1 秒内加热到 400 °C 以上。这意味着在MEMS器件封装后，吸气剂可以被快速激活和重新激活。