Abstract To apply a pre-oxidation treatment on aluminum nitride (AlN) substrate is a common practice before its metallization. In the present study, the microstructure of AlN after oxidation either in dry air or in wet air is characterized. The resulting thermal conductivity is measured. With or without the presence of water vapor, the oxidation of AlN is a reaction-dominating process. The addition of water vapor speeds up the oxidation rate by one order of magnitude. The surface oxide layer is full of nano-sized pores. The presence of surface oxide reduces the thermal conductivity by ∼15% when the thickness of oxide layer is only 3 μm.

中文翻译：

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通过添加水蒸气加速AlN衬底的氧化速率

摘要 在氮化铝 (AlN) 衬底上进行预氧化处理是金属化前的常见做法。在本研究中，表征了在干燥空气或潮湿空气中氧化后 AlN 的微观结构。测量所得的热导率。无论是否存在水蒸气，AlN 的氧化都是反应主导过程。水蒸气的加入使氧化速率加快了一个数量级。表面氧化层布满纳米级孔隙。当氧化层厚度仅为 3 μm 时，表面氧化物的存在使热导率降低约 15%。