The present paper studies experimentally and numerically the surface acoustic wave (SAW) field on a piezoelectric substrate generated by interdigital transducers (IDT). On the one hand, mechanical displacements produced by the SAW are measured with the help of a laser Doppler vibrometer. On the other hand, mechanical displacements are computed by the two-dimensional finite element method in frequency domain followed by the spatial Fourier transform. Combining these two steps of computations results in the intended two-dimensional distribution of mechanical displacements on the substrate surface. The comparison of experimental and numerical data obtained for a series of different IDTs reveals that it is possible to estimate the shape of the SAW beam and the absolute value of mechanical displacement amplitude using only the basic parameters of the IDT and its electrical admittance measured by a network analyzer.

中文翻译：

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声表面波有界梁中机械位移的实验和数值研究

本论文通过实验和数值研究了由叉指式换能器 (IDT) 产生的压电基板上的表面声波 (SAW) 场。一方面，在激光多普勒测振仪的帮助下测量由 SAW 产生的机械位移。另一方面，机械位移通过频域中的二维有限元方法随后进行空间傅立叶变换来计算。将这两个计算步骤结合起来，就可以得到基板表面机械位移的预期二维分布。