In this paper, we propose a P-Matrix model for the frequency analysis of SAW-delay line based on AlScN/Sapphire layered structures with 12.5 %, 25 % and 37.5 % scandium (Sc) concentrations. The effect of scandium concentration on the acoustic surface wave velocity, the electrode reflectivity, the transduction coefficient, the propagation loss and the distributed finger capacitance was taken into account in the frequency analysis of the layered SAW delay line. The acoustico-mechanical characterization indicated that the AlScN exhibit higher piezoelectric properties compared with those of pure AlN films, leading to significant improvement of electromechanical coupling coefficient. It also found that the Young’s modulus and the hardness of AlN film decrease significantly when Sc is doped, and is responsible for the decreased acoustic velocity. Additionally, the frequency analysis of AlScN-SAW delay line showed that the lower insertion loss predicted from the high Sc concentration, demonstrating the potential applications of AlScN in RF-MEMS applications. The resonant frequency also shifted slightly to the lower frequencies with increasing scandium concentration.

在本文中，我们提出了一个基于AlScN /蓝宝石层状结构（Al浓度为12.5％，25％和37.5％）的SAW延迟线频率分析的P矩阵模型。在分层SAW延迟线的频率分析中，考虑了dium浓度对声表面波速度，电极反射率，传导系数，传播损耗和指状电容分布的影响。声学-机械特性表明，与纯AlN膜相比，AlScN表现出更高的压电性能，从而导致机电耦合系数的显着提高。还发现，掺杂Sc时，AlN薄膜的杨氏模量和硬度显着降低，并且是声速降低的原因。此外，对AlScN-SAW延迟线的频率分析表明，从高Sc浓​​度预测出较低的插入损耗，证明了AlScN在RF-MEMS应用中的潜在应用。随着scan浓度的增加，共振频率也略微移至较低频率。