This letter shows that active tuning of MEMS resonators through temperature is highly dependent on the actuation mechanism used, and demonstrates the adverse effects of using substrate conductive heating characterization results to predict device’s performance in their final application, where Joule heating is most likely to be used. A buckled VO2-based SiO2 tunable MEMS resonator is used in the study, where the thermal frequency stability or active tuning of the resonant frequency is thermally induced. The VO2 phase transition is triggered by substrate heating and Joule heating. When using Joule heating, the increasing strain energy during the phase transition results in a monotonic increase in resonant frequency, with a maximum resonant frequency shift of 11.9%. For substrate heating, the resonant frequency shift is non-monotonic and shows a 10.6% increase followed by a 7.8% decrease. The different frequency shift patterns that are observed for two heating mechanisms can be attributed to different stress-strain responses. [2019-0256]

中文翻译：

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JMEMS Letters MEMS 谐振器中频率调谐的驱动相关性

这封信表明，通过温度对 MEMS 谐振器进行有源调谐高度依赖于所使用的驱动机制，并展示了使用基板传导加热表征结果来预测设备在最终应用中的性能的不利影响，其中最有可能使用焦耳加热. 研究中使用了基于 VO2 的弯曲 SiO2 可调谐 MEMS 谐振器，其中热频率稳定性或谐振频率的有源调谐是热感应的。VO2 相变由衬底加热和焦耳加热触发。使用焦耳加热时，相变期间增加的应变能导致谐振频率单调增加，最大谐振频移为 11.9%。对于基板加热，共振频移是非单调的，显示为 10。增加 6%，然后减少 7.8%。针对两种加热机制观察到的不同频移模式可归因于不同的应力应变响应。[2019-0256]