Passive implantable or portable infusion pumps comprise an energy source to pressurize a drug and a fluidic restriction to determine the delivery rate. MEMS technology enables the design of microfluidic chips that can passively regulate the flow rate and therefore limit the impact of pressure variations on flow accuracy. The device is a triple-stack structure made of silicon and borosilicate with valves associated in parallel. Flow regulation is obtained from the deflection of a silicon membrane that progressively obstructs the valves as the reservoir pressure increases. Samples dedicated to the infusion at 1 ml/h and 1 ml/day have been designed, manufactured and tested. Flow regulation in the pressure range 200–1000mbar was obtained, with an overall flow rate variability of +/−10% with respect to nominal targets. By comparison to commercial devices, these data showed a reduction of the flow variability up to a factor 2.4 and the lowering of the reservoir pressure by a factor 5. A passive flow regulator coupled with an active valve would match the flow control capabilities of the state-of-the-art programmable implantable pumps. Furthermore, these microfluidic chips could be adapted to disposable pumps to improve the flow accuracy during the infusion of potent drugs having short half-lives. [2019-0161]

中文翻译：

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用于植入式和流动输液泵的基于 3 层 MEMS 的无源流量调节器的设计和表征

被动植入式或便携式输液泵包括对药物加压的能量源和确定输送速率的流体限制。MEMS 技术使微流体芯片的设计成为可能，这种芯片可以被动调节流速，从而限制压力变化对流量精度的影响。该设备是由硅和硼硅酸盐制成的三重堆叠结构，并带有并联的阀门。流量调节是通过硅膜的偏转获得的，硅膜随着储存器压力的增加逐渐阻塞阀门。专门用于以 1 毫升/小时和 1 毫升/天的速度输注的样品已经过设计、制造和测试。获得了 200-1000mbar 压力范围内的流量调节，相对于标称目标的总流量变化率为 +/-10%。与商业设备相比，这些数据显示流量可变性降低了 2.4 倍，储层压力降低了 5 倍。与主动阀结合的被动流量调节器将匹配该州的流量控制能力最先进的可编程植入泵。此外，这些微流控芯片可适用于一次性泵，以提高半衰期短的强效药物输注过程中的流量准确性。[2019-0161] 这些微流控芯片可适用于一次性泵，以提高半衰期短的强效药物输注过程中的流量准确性。[2019-0161] 这些微流控芯片可适用于一次性泵，以提高半衰期短的强效药物输注过程中的流量准确性。[2019-0161]