We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip device layer micro-oven that utilizes less than 30mW for resonator temperature control over variations in external temperature from −40°C to +60°C. The device layer micro-oven enables correction for ambient temperature variations and achieves a 1-week frequency stability for the output mode over temperature near 1.5 ppb for the Lamé-mode resonator. The devices were built in the Epi-Seal fabrication process and take advantage of the exceptional long-term stability of MEMS resonators built in that process. These results exceed all prior reports for frequency stability over time and temperature for MEMS resonators and have the potential to impact the development of miniature, low-power time references. [2019-0054]

中文翻译：

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在温度范围内具有 PPB 稳定性的低功耗双模 MEMS 谐振器

我们展示了两种新颖的双模恒温 MEMS 谐振器，每个谐振器都带有一个芯片内器件层微型烤箱，利用低于 30mW 的功率对从 -40°C 到 +60°C 的外部温度变化进行谐振器温度控制。器件层微型烤箱能够校正环境温度变化，并实现了输出模式 1 周频率稳定性随温度变化的拉梅模式谐振器接近 1.5 ppb。这些器件是在 Epi-Seal 制造工艺中构建的，并利用了在该工艺中构建的 MEMS 谐振器卓越的长期稳定性。这些结果超过了之前关于 MEMS 谐振器频率稳定性和温度稳定性的所有报告，并有可能影响微型、低功耗时间基准的开发。[2019-0054]