We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk) signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force microscopy (AFM). The probe is an Si microcantilever on which a two-layer piezoelectric stack transducer is microfabricated. The top transducer in the stack functions as an actuator, while the bottom transducer is used as a deflection sensor. This arrangement leads to a collocated actuator-sensor pair that co-exist on the same surface area. We report experimental results that establish the sensor's ability to capture the full dynamic range of the cantilever with minimal feedthrough from the actuator. [2019-0143].

中文翻译：

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具有并置压电执行器-传感器对的高动态范围 AFM 悬臂梁


我们提出了一种从根本上消除动态模式原子力显微镜（AFM）中使用的自感应压电微悬臂梁中的电馈通（串扰）信号的新颖方法。该探头是一个硅微悬臂梁，其上微加工有两层压电叠层换能器。堆叠中的顶部传感器用作执行器，而底部传感器用作偏转传感器。这种布置导致致动器-传感器对共存于同一表面区域。我们报告的实验结果表明，传感器能够以最小的执行器馈通捕获悬臂的完整动态范围。 [2019-0143]。