Abstract

Single transducer-based sensors have limitations of sensitivity and detection range. To enhance the sensitivity and range of detection here, a multi-transducer-based sensing array is designed for humidity sensing applications. Two-dimensional (2D) transition metal dichalcogenide (TMDC) namely MoSe₂ nano-flakes and an organic semiconducting polymer polyvinyl alcohol (PVOH) are employed as active layers for two different sensors on a single polyethylene terephthalate (PET) substrate. Here, MoSe₂ nano-flakes are highly responsive towards the low relative humidity (RH) region below 50% RH, while the PVOH is responsive to high humidity levels above 50% RH. The two sensors are combined in series as sensor array, which are capable to detect linear humidity response from all range of RH. Screen-printing and spin coating techniques are utilized for fabrication of inter digital electrodes (IDEs) and active layers, respectively. The impedance responses of individual as well as sensor array are recorded at 1 kHz frequency to analyze the fabricated sensor, and COMSOL Multiphysics platform is used for designing and verification of experimental results. The fabricated sensor is capable to detect a wide range from 0 to 100% RH, with a response time (T_res) of 0.6 s and recovery time (T_rec) of 0.9 s with a very high sensitivity of 50 kΩ/RH. This approach can resolve the limitations of sensitivity, detection range, and response time faced in single transducer-based sensors.

中文翻译：

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结合了MoSe 2和PVOH的所有印刷的宽范围湿度传感器阵列

摘要

基于单个传感器的传感器在灵敏度和检测范围方面存在局限性。为了提高此处的灵敏度和检测范围，针对湿度传感应用设计了基于多传感器的传感阵列。二维（2D）过渡金属二硫化碳（TMDC），即MoSe ₂纳米薄片和有机半导体聚合物聚乙烯醇（PVOH），被用作单个聚对苯二甲酸乙二醇酯（PET）基板上两个不同传感器的活性层。在这里，MoSe ₂纳米薄片对低于50％RH的低相对湿度（RH）区域具有高度响应，而PVOH对高于50％RH的高湿度水平具有响应。这两个传感器串联在一起作为传感器阵列，能够检测所有相对湿度范围内的线性湿度响应。丝网印刷和旋涂技术分别用于制造数字间电极（IDE）和有源层。以1 kHz的频率记录单个以及传感器阵列的阻抗响应，以分析所制造的传感器，COMSOL Multiphysics平台用于设计和验证实验结果。制成的传感器能​​够检测0至100％RH的宽范围，响应时间（T _res）为0.6 s，恢复时间（T_rec）为0.9 s，灵敏度非常高，为50kΩ/ RH。这种方法可以解决单个基于传感器的传感器在灵敏度，检测范围和响应时间方面的局限性。