Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor's effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

中文翻译：

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基于电容和压电微机械超声换能器-CMUT和PMUT的质量传感器。

基于微机电系统（MEMS）的质量传感器由于其结构紧凑，功耗低以及易于与读出电路集成等优点，被认为是高度敏感的化学和气体检测应用的潜在候选者。本文提出了一种新的方法，用于开发基于电容和压电换能器配置的微机械质量传感器，用于复杂环境中的低浓度水平气体检测。这些微机械传感器基于其中心共振频率的变化进行操作。这种变化是由于当暴露于目标气体分子时传感器的有效质量发生变化而引起的，该变化随后与气体浓度水平相关。在这项工作中，研究了基于电容和压电的微机械传感器及其工作原理，