A new contact-type on-machine measurement system is designed and developed for the evaluation of a micro cutting edge profile. The measurement system is composed of a compact probe unit having a sharp stylus mounted on a flexible beam, an inner displacement sensor for the detection of the stylus displacement, and a two-axis precision positioning system. For the evaluation of tool faces having a steep slope, a new probing procedure with the enhancement of the inner displacement sensor integrated into the probe unit is newly proposed. After the design and development of the probe unit, the feasibilities of the developed measurement system and the proposed probing procedure are demonstrated through some basic experiments. Regarding the out-of-straightness and angular error motion of the two-axis positioning system employed in the developed measurement system, a pair of length gauges is newly employed to reduce the influences of error motions of the stage system. The topographic profile of the micro cutting edge obtained by the measurement system with the modified probe unit is then compared with those obtained by a commercial stylus profiler and a laser confocal microscope. The feasibility and effectiveness of the developed on-machine tool edge profile measurement system are also demonstrated through uncertainty analysis based on the GUM with the Monte-Carlo method.

设计和开发了一种新的接触式机上测量系统，用于评估微切削刃轮廓。该测量系统由一个紧凑的探针单元和一个两轴精密定位系统组成，该探针单元具有安装在柔性梁上的尖锐测针，用于检测测针位移的内部位移传感器。为了评估具有陡峭斜率的工具面，新提出了一种新的探测程序，其中增加了集成到探针单元中的内部位移传感器。在设计和开发了探针单元之后，通过一些基础实验证明了开发的测量系统和提议的探测程序的可行性。关于在开发的测量系统中使用的两轴定位系统的不直线度和角度误差运动，新采用了一对长度计以减少平台系统的误差运动的影响。然后将通过具有改进的探针单元的测量系统获得的微切削刃的形貌轮廓与通过商用测针轮廓仪和激光共聚焦显微镜获得的形貌轮廓进行比较。通过基于蒙特卡洛方法的GUM的不确定性分析，也证明了开发的机床边缘轮廓测量系统的可行性和有效性。然后将通过具有改进的探针单元的测量系统获得的微切削刃的形貌轮廓与通过商用测针轮廓仪和激光共聚焦显微镜获得的形貌轮廓进行比较。通过基于蒙特卡洛方法的GUM的不确定性分析，也证明了开发的机床边缘轮廓测量系统的可行性和有效性。然后将通过具有改进的探针单元的测量系统获得的微切削刃的形貌轮廓与通过商用测针轮廓仪和激光共聚焦显微镜获得的形貌轮廓进行比较。通过基于蒙特卡洛方法的GUM的不确定性分析，也证明了开发的机床边缘轮廓测量系统的可行性和有效性。