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Suspended Nanochannel Resonator Arrays with Piezoresistive Sensors for High-Throughput Weighing of Nanoparticles in Solution.
ACS Sensors ( IF 8.2 ) Pub Date : 2020-04-01 , DOI: 10.1021/acssensors.0c00394
Marco Gagino 1, 2, 3, 4 , Georgios Katsikis 1 , Selim Olcum 1, 5 , Leopold Virot 2 , Martine Cochet 2 , Aurélie Thuaire 2 , Scott R Manalis 1, 6, 7 , Vincent Agache 1, 2
Affiliation  

As the use of nanoparticles is expanding in many industrial sectors, pharmaceuticals, cosmetics among others, flow-through characterization techniques are often required for in-line metrology. Among the parameters of interest, the concentration and mass of nanoparticles can be informative for yield, aggregates formation or even compliance with regulation. The Suspended Nanochannel Resonator (SNR) can offer mass resolution down to the attogram scale precision in a flow-through format. However, since the readout has been based on the optical lever, operating more than a single resonator at a time has been challenging. Here we present a new architecture of SNR devices with piezoresistive sensors that allows simultaneous readout from multiple resonators. To enable this architecture, we push the limits of nanofabrication to create implanted piezoresistors of nanoscale thickness (∼100 nm) and implement an algorithm for designing SNRs with dimensions optimized for maintaining attogram scale precision. Using 8-in. processing technology, we fabricate parallel array SNR devices which contain ten resonators. While maintaining a precision similar to that of the optical lever, we demonstrate a throughput of 40 000 particles per hour-an order of magnitude improvement over a single device with an analogous flow rate. Finally, we show the capability of the SNR array device for measuring polydisperse solutions of gold particles ranging from 20 to 80 nm in diameter. We envision that SNR array devices will open up new possibilities for nanoscale metrology by measuring not only synthetic but also biological nanoparticles such as exosomes and viruses.

中文翻译:

具有压阻传感器的悬浮纳米通道谐振器阵列,用于溶液中纳米颗粒的高通量称量。

随着纳米颗粒的使用在许多工业领域中不断扩展,例如制药,化妆品等,在线计量学通常需要流通表征技术。在感兴趣的参数中,纳米颗粒的浓度和质量可以为产量,聚集体形成或什至遵守法规提供信息。悬浮式纳米通道谐振器(SNR)可以以流通格式提供质量分辨率,可降低到ATT刻度精度。但是,由于读数是基于光杆,因此一次操作多个谐振器是一项挑战。在这里,我们介绍了具有压阻传感器的SNR器件的新架构,该架构允许同时从多个谐振器读出数据。要启用此架构,我们突破了纳米制造的极限,以创建纳米级厚度(〜100 nm)的植入式压敏电阻,并实现了一种算法,该算法可设计具有优化尺寸的SNR,以保持Attogram比例精度。使用8英寸 在处理技术上,我们制造了包含十个谐振器的并行阵列SNR器件。在保持与光学杠杆相似的精度的同时,我们展示了每小时可处理4万个粒子的吞吐量-与具有类似流速的单个设备相比,提高了一个数量级。最后,我们展示了SNR阵列设备测量直径在20到80 nm范围内的金颗粒的多分散溶液的能力。
更新日期:2020-04-01
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