This study focuses on the analysis of microstructural, elemental and phase compositions of surface and near-surface layers of titanium after the implantation of aluminium. A titanium alloy with a chemical composition close to commercially pure titanium (grade 2) was used as the target material. Ion implantation was performed using two modes of irradiation: 1. repetitively pulsed ion beams with a mean ion energy of 35 keV; 2. low-energy-focused ion beams of high intensity with a mean ion energy of 2.6 keV. The irradiation fluence reached 1.1 × 10¹⁸ ion/cm² using the first mode and 1.6 × 10²¹ ion/cm² using the second mode. In both cases, the beam itself heated the targets. The peak concentration of aluminium after the implantation of medium-energy ions was ~65 at.%, and the maximum depth of dopant penetration was 2.6 μm. On the contrary, in the case of high-intensity low-energy ion implantation, the surface concentration of dopant reached a maximum of 25 at.%, but the depth of penetration increased significantly and achieved 50 μm. The results of X-ray diffraction (XRD) and transmission electron microscopy (TEM) showed that fine-grained intermetallic phases, Ti₃Al and TiAl, and solid solutions of various compositions were possibly formed after the medium-energy ion implantation. The mean grain size of the intermetallic phases was ~50 nm. XRD and TEM analyses in the case of low-energy high-intensity ion implantation demonstrated the formation of the ion-alloyed layer, which comprised intermetallic phase Ti₃Al and solid solutions of aluminium in titanium. The grain size of Ti₃Al phase can be 5 μm and more.

这项研究的重点是分析铝注入后钛表面和近表面层的微观结构，元素和相组成。使用化学成分接近于商业纯钛（等级2）的钛合金作为目标材料。离子注入使用两种照射方式进行：1.重复脉冲离子束，平均离子能量为35 keV；2.高强度低能量聚焦离子束，平均离子能量为2.6 keV。使用第一模式的辐照通量达到1.1×10 ¹⁸ ion / cm ²，达到1.6×10 ²¹ ion / cm ²使用第二种模式。在这两种情况下，光束本身都会加热目标。注入中能离子后，铝的峰值浓度为〜65 at。％，最大掺杂深度为2.6μm。相反，在高强度低能量离子注入的情况下，掺杂剂的表面浓度最高达到25 at。％，但渗透深度显着增加，达到50μm。X射线衍射（XRD）和透射电子显微镜（TEM）的结果表明，细粒金属间相Ti ₃在中能离子注入之后，可能形成Al和TiAl以及各种组成的固溶体。金属间相的平均晶粒尺寸为〜50nm。在低能高强度离子注入的情况下，XRD和TEM分析表明形成了离子合金层，该离子合金层包括金属间相Ti ₃ Al和铝在钛中的固溶体。Ti ₃ Al相的晶粒尺寸可以为5μm以上。