Here, we present a modular constructed metal-grid micro cavity plasma array as a flexible, robust, and simple alternative to micro-structured devices based on silicon. They show great potential for applications requiring large-area treatment, catalytic conversion or decomposition of volatile organic compounds. The metal-grid array is an easily assembled layered structure consisting of a metal grid, a dielectric foil and a magnet. The grid contains between hundreds and thousands of uniformly arranged cavities with a diameter of 150 μ m. The whole system is kept together by magnetic force. This also allows disassembling and exchange of the components independently. Typically, the arrays are operated close to atmospheric pressure with an alternating voltage of up to 1.4 kV peak-to-peak in the kHz range. For a first comparison with silicon-based configurations, the metal-grid array is examined from two different perspectives using phase-resolved imaging. The individual cavitie...

中文翻译：

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模块化构造的金属栅格阵列-催化应用的硅基微等离子体装置的替代品

在这里，我们提出了一种模块化构造的金属网格微腔等离子体阵列，作为基于硅的微结构器件的一种灵活，强大且简单的替代方案。它们对于需要大面积处理，催化转化或挥发性有机化合物分解的应用显示出巨大的潜力。金属栅格阵列是易于组装的分层结构，由金属栅格，介电箔和磁体组成。栅格包含成百上千个直径为150μm的均匀排列的空腔。整个系统通过磁力保持在一起。这也允许独立地拆卸和更换部件。通常，阵列在接近大气压的条件下以kHz范围内峰峰值达到1.4 kV的交流电压工作。为了与基于硅的配置进行首次比较，使用相分辨成像从两个不同的角度检查了金属栅格阵列。个别的cavitie ...