Fast tool servo (FTS) is playing an important role in ultraprecision machining, which however suffers the drawback that the tool/workpiece interaction force as a vital process parameter cannot be monitored. In this article, a novel self-sensing fast tool servo (SFTS) capable of simultaneous control of tool position and measurement of thrust force is developed. The SFTS is especially devised by adopting a novel dual feedback configuration to achieve the decoupled sensing of thrust force, whereas assuring the independent tool moving in feed direction. Analytical model and finite-element model are established to demonstrate the effectiveness of designed SFTS. Apart from the extended capability of traditional FTS in force sensing, theoretical analysis also reveals the proposed SFTS possesses a broad working bandwidth. Experimental verifications are carried out, and the results confirm that the SFTS exhibits nanoscale positioning accuracy, kilohertz-level working bandwidth, and meanwhile millinewton-level force sensing performance. The enabled self-sensing ability and superior performances make this unique SFTS promising and practical for broad applications in ultraprecision machining.

中文翻译：

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新型自感知快刀伺服系统的设计、分析与测试


快速刀具伺服（FTS）在超精密加工中发挥着重要作用，但其缺点是刀具/工件相互作用力作为重要的工艺参数无法监控。在本文中，开发了一种新型自感知快速刀具伺服系统（SFTS），能够同时控制刀具位置和测量推力。 SFTS经过专门设计，采用新颖的双反馈配置来实现推力的解耦传感，同时确保独立刀具沿进给方向移动。建立解析模型和有限元模型来验证所设计的SFTS的有效性。除了传统 FTS 在力传感方面的扩展能力之外，理论分析还表明所提出的 SFTS 具有广泛的工作带宽。进行了实验验证，结果证实SFTS具有纳米级的定位精度、千赫兹级的工作带宽，同时具有毫牛顿级的力传感性能。所启用的自感知能力和卓越的性能使这种独特的 SFTS 在超精密加工的广泛应用中具有广阔的前景和实用性。