In this letter, we report a performance enhanced thermopile with rough dielectric film black. The pyramidally-textured structure is in-situ formed in the thin dielectric film as an infrared absorber by hard-molding method. Compared to flat dielectric film-based thermopile with the same size, the output voltage, responsivity, and detectivity of the thermopile with rough dielectric film black can be improved by approximately 38%, while the response time constant remains less than 10 ms. The pyramidally- textured dielectric film provides a new opportunity to enhance the performance of thermopiles with the simple process as well as low cost.

中文翻译：

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具有黑色粗糙介电膜的性能增强型热电堆


在这封信中，我们报告了一种具有黑色粗糙介电膜的性能增强型热电堆。通过硬模压方法在介电薄膜中原位形成金字塔纹理结构作为红外吸收体。与相同尺寸的基于平坦介电薄膜的热电堆相比，具有粗糙介电薄膜黑色的热电堆的输出电压、响应度和检测率可提高约38%，而响应时间常数仍小于10毫秒。金字塔纹理介电薄膜为提高热电堆性能提供了新的机会，工艺简单且成本低廉。