There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS-SOI transistor integrated with a catalytic reaction plate acts as a sensing element. This study emphasizes GMOS performance modeling, technological aspects, and sensing-selectivity issues. Two deposition techniques of a Pt catalytic layer suitable for wafer-level processing were compared, magnetron sputtering and nanoparticle inkjet printing. Both techniques have been useful for the fabrication of GMOS sensor, with good sensitivity to ethanol and acetone in the air. However, a printed Pt nanoparticle catalyst provides almost twice as much sensitivity as compared to that of the sputtered catalyst. Moreover, sensing selectivity in the ethanol/acetone gas mixture was demonstrated for the GMOS with a Pt nanoparticle catalyst. These advantages of GMOS allow for the fabrication of a low-cost gas sensor that requires a low power, and make it a promising technology for future smartphones, wearables, and Internet of Things (IoT) applications.

中文翻译：

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用于气体混合物分析的新型微型选择性燃烧型CMOS气体传感器-第1部分：化学方面的重点。

目前正在努力制造用于家用和工业用途的微型，低成本，灵敏且选择性的气体传感器。本文提出了一种基于热传感器的微型燃烧型气体传感器（GMOS），其中集成有催化反应板的微机械CMOS-SOI晶体管用作传感元件。这项研究着重于GMOS性能建模，技术方面以及感测选择性问题。比较了适用于晶片级处理的两种Pt催化层沉积技术：磁控溅射和纳米粒子喷墨印刷。两种技术都对制造GMOS传感器有用，它对空气中的乙醇和丙酮具有良好的敏感性。然而，印刷的Pt纳米颗粒催化剂提供的灵敏度几乎是溅射催化剂的两倍。此外，对于具有Pt纳米颗粒催化剂的GMOS，证明了在乙醇/丙酮气体混合物中的检测选择性。GMOS的这些优点允许制造需要低功耗的低成本气体传感器，并使之成为未来智能手机，可穿戴设备和物联网（IoT）应用的有前途的技术。