Abstract Tungsten oxide (WO3) has a great significance in variety of fields. In this work, WO3 nanotube arrays (NTs) were successfully fabricated onto a Si substrate covered with WO3 thin film by thermal evaporation method. Various characterization indicated that these NTs show a hexagonal shape at their tips and the side planes are well-faceted. The formation mechanism of NTs induced by WO3 thin film seeds was detailed discussed. Furthermore, the H2S sensing performance was analyzed and exhibited good performance at low temperature, which is beneficial to saving power and integrated device. Therefore, this study provides a simple and universal method for the preparation of metal oxide nanotube arrays, which provides a useful platform for the high-performance gas sensors.

中文翻译：

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WO3 纳米管阵列的原位生长及其 H2S 气敏特性以降低工作温度

摘要 氧化钨（WO3）在各个领域都具有重要意义。在这项工作中，WO3 纳米管阵列 (NTs) 通过热蒸发方法成功地制造到覆盖有 WO3 薄膜的 Si 衬底上。各种表征表明，这些 NTs 在其尖端显示出六边形形状，并且侧面有很好的刻面。详细讨论了WO3薄膜种子诱导NTs的形成机制。此外，还分析了 H2S 传感性能，并在低温下表现出良好的性能，有利于节省功耗和集成器件。因此，本研究为制备金属氧化物纳米管阵列提供了一种简单通用的方法，为高性能气体传感器提供了一个有用的平台。