Abstract Diamond-like carbon (DLC)/graphite-like carbon (GLC) composite films were prepared with high-power impulse magnetron sputtering (HiPIMS) using a mixture of Ar and Ne as the sputtering gas. The effect of the Ne fraction in the sputtering gas on the surface morphology, carbon bonding structure, microstructure, mechanical properties, residual stress, and tribological performance of the deposited films were characterized using laser scanning confocal microscopy, Raman spectroscopy, nano-indentation, residual stress tester, and friction and wear testing using a ball-on- plate tribometer, respectively. The films have a composite surface structure consisting of sp2-rich GLC microparticles embedded in an sp3-rich DLC matrix. Both components can be controlled to some degree by varying the Ne fraction. Specifically, as the Ne fraction is increased, both the number and size of the GLC microparticles decreases, while the sp3 content increases. The GLC microparticles in the film can reduce the real contact area in friction testing, decreasing the friction coefficient, while the sp3-rich DLC phase enables the high hardness and wear resistance of the films. By adjusting the Ne fraction during the HiPIMS process, DLC/GLC composite films with low friction and high wear resistance can be generated.

中文翻译：

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高功率脉冲磁控溅射沉积类金刚石/类石墨碳复合薄膜

摘要 采用Ar和Ne的混合气体作为溅射气体，采用高功率脉冲磁控溅射(HiPIMS)制备类金刚石碳(DLC)/类石墨碳(GLC)复合薄膜。利用激光扫描共聚焦显微镜、拉曼光谱、纳米压痕、残余应力等表征溅射气体中的 Ne 分数对沉积薄膜的表面形貌、碳键结构、微观结构、力学性能、残余应力和摩擦学性能的影响。应力测试仪，以及分别使用球盘摩擦计进行摩擦和磨损测试。该薄膜具有复合表面结构，由嵌入富含 sp3 的 DLC 基质中的富含 sp2 的 GLC 微粒组成。通过改变 Ne 分数，可以在一定程度上控制这两种成分。具体来说，随着 Ne 分数的增加，GLC 微粒的数量和大小均减少，而 sp3 含量增加。薄膜中的 GLC 微粒可以减少摩擦测试中的实际接触面积，降低摩擦系数，而富含 sp3 的 DLC 相使薄膜具有高硬度和耐磨性。通过在 HiPIMS 过程中调整 Ne 分数，可以生成具有低摩擦和高耐磨性的 DLC/GLC 复合薄膜。