当前位置: X-MOL 学术Surf. Coat. Technol. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Study on thermoelectric property optimization of mixed-phase bismuth telluride thin films deposited by co-evaporation process
Surface & Coatings Technology ( IF 5.3 ) Pub Date : 2020-03-26 , DOI: 10.1016/j.surfcoat.2020.125694
Yen-Ju Wu , Shih-Chieh Hsu , Ya-Cheng Lin , Yibin Xu , Tung-Han Chuang , Sheng-Chi Chen

The development of Bi2Te3 thin films has huge potential in the pursuit of efficient thermoelectric micro/nanodevices due to their high Seebeck coefficient, high electrical conductivity and low thermal conductivity. The optimization of experimental parameters of Bi-Te thin films produced by co-evaporation will be investigated in this study. Co-evaporation is a low cost, easy-to-control process which can be used for high throughput and is scalable. We found that an optimal Te/Bi ratio of 1.5 with good thermoelectric properties can be directly synthesized by Bi and Bi2Te3 co-evaporation. Compared to the conventional Bi/Te co-evaporation process, high temperature annealing or substrate heating is not necessary for the process mentioned in this paper, which is a desirable feature when using polymer-based substrates, organic/inorganic hybrid thermoelectric generators, and flexible devices since they have relatively low tolerance to heat. The optimized Bi2Te3 thin films, which are mixed phases of Bi2Te3, Bi3Te4 and Te, possess high carrier concentration (6.65 × 1020 cm−3), low electrical resistivity (3.17 × 10−3 Ωcm), and extremely low thermal conductivity (0.59 W/mK) at room temperature on a smooth surface (roughness <5.5 nm) and are achieved by adjusting the deposition rate of Bi and Bi2Te3. The correlation between the structures of mixed phases, electrical and thermal properties will be discussed in detail.



中文翻译:

共蒸发法制备混合相碲化铋薄膜的热电性能优化研究

Bi 2 Te 3薄膜的发展因其高塞贝克系数,高电导率和低热导率而在追求高效热电微/纳米器件方面具有巨大潜力。本研究将研究通过共蒸发制备的Bi-Te薄膜的实验参数的优化。共蒸发是一种低成本,易于控制的过程,可用于高通量且可扩展。我们发现,Bi和Bi 2 Te 3可以直接合成具有良好热电性能的最佳Te / Bi比为1.5。共蒸发。与常规的Bi / Te共蒸发工艺相比,本文提到的工艺不需要高温退火或基板加热,这在使用基于聚合物的基板,有机/无机混合热电发生器和柔性基板时是一个理想的功能。设备,因为它们具有相对较低的耐热性。优化的Bi 2 Te 3薄膜是Bi 2 Te 3,Bi 3 Te 4和Te的混合相,具有高载流子浓度(6.65×10 20  cm -3),低电阻率(3.17×10 -3)Ωcm),并且在室温下在光滑表面(粗糙度<5.5 nm)上具有极低的热导率(0.59 W / mK),这可以通过调节Bi和Bi 2 Te 3的沉积速率来实现。将详细讨论混合相的结构,电性质和热性质之间的相关性。

更新日期:2020-03-26
down
wechat
bug